A High Sensitivity Electric Field Microsensor Based on Torsional Resonance
نویسندگان
چکیده
منابع مشابه
A High Sensitivity Electric Field Microsensor Based on Torsional Resonance
This paper proposes a high sensitivity electric field microsensor (EFM) based on torsional resonance. The proposed microsensor adopts torsional shutter, which is composed of shielding electrodes and torsional beams. The movable shielding electrodes and the fixed sensing electrodes are fabricated on the same plane and interdigitally arranged. Push-pull electrostatic actuation method is employed ...
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ژورنال
عنوان ژورنال: Sensors
سال: 2018
ISSN: 1424-8220
DOI: 10.3390/s18010286